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Surface micromachining for microelectromechanical systems

✍ Scribed by Bustillo, J.M.; Howe, R.T.; Muller, R.S.

Book ID: 115461272
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 488 KB
Volume: 86
Category: Article
ISSN: 0018-9219
DOI: 10.1109/5.704260

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