Silicon micromachining processes combined with thick-film printed lead zirconate titanate actuators for microelectromechanical systems

✍ Scribed by S.P Beeby; A Blackburn; N.M White

• Book ID: 117358761
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 642 KB
• Volume: 40
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/s0167-577x(99)00073-7