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Step-Flow Growth of InN on N-Polarity GaN Template by Molecular Beam Epitaxy with a Growth Rate of 1.3 μm/h

✍ Scribed by K. Xu; W. Terashima; T. Hata; N. Hashimoto; Y. Ishitani; A. Yoshikawa


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
162 KB
Volume
0
Category
Article
ISSN
1862-6351

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InGaN/GaN multiple quantum-wells (MQWs) on Ga-polarity GaN by plasma-assisted molecularbeam epitaxy were grown and characterized. In-situ reflection high-energy-electron diffraction observations and high-resolution X-ray diffraction results indicated that a flat interface and a good periodicity of t