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Statistically sound evaluation of trace element depth profiles by ion beam analysis

✍ Scribed by K. Schmid; U. von Toussaint

Book ID
113823883
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
516 KB
Volume
281
Category
Article
ISSN
0168-583X

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Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g