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Statistical properties of atomic-scale Si/SiO2 interface roughness studied by STM

✍ Scribed by M. Niwa; H. Iwasaki; Y. Watanabe; I. Sumita; N. Akutsu; Y. Akutsu


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
793 KB
Volume
60-61
Category
Article
ISSN
0169-4332

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