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Static recording characteristics of new type super-resolution near-field structure

โœ Scribed by Feng Zhang; Wendong Xu; Yang Wang; Jinsong Wei; Fei Zhou; Xiumin Gao; Fuxi Gan


Book ID
115367080
Publisher
Optics InfoBase
Year
2004
Tongue
English
Weight
631 KB
Volume
2
Category
Article
ISSN
1671-7694

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We have succeeded in fabricating narrow grooves in a photoresist film by a new lithography technique using an optical near-field with 365nm and 440nm light sources. This technique makes use of super-resolution near-field structure (Super-RENS) which is composed of multilayres to convert a focused la