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Near-Field Optical Simulation of Super-Resolution Near-Field Structure Disks

โœ Scribed by Nakano, Takashi; Yamakawa, Yuzo; Tominaga, Junji; Atoda, Nobufumi


Book ID
118068542
Publisher
Institute of Pure and Applied Physics
Year
2001
Tongue
English
Weight
264 KB
Volume
40
Category
Article
ISSN
0021-4922

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We have succeeded in fabricating narrow grooves in a photoresist film by a new lithography technique using an optical near-field with 365nm and 440nm light sources. This technique makes use of super-resolution near-field structure (Super-RENS) which is composed of multilayres to convert a focused la