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Static and dynamic characterization of AlN-driven microcantilevers using optical interference microscopy

✍ Scribed by Katarzyna Krupa; Michał Józwik; Christophe Gorecki; Alexandru Andrei; Łukasz Nieradko; Patrick Delobelle; Laurent Hirsinger


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
764 KB
Volume
47
Category
Article
ISSN
0143-8166

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