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Static and dynamic characterization of AlN-driven microcantilevers using optical interference microscopy

✍ Scribed by Katarzyna Krupa; Michał Józwik; Christophe Gorecki; Alexandru Andrei; Łukasz Nieradko; Patrick Delobelle; Laurent Hirsinger

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 764 KB
Volume: 47
Category: Article
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2008.05.001

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