Metrology, static and dynamic characterization of microstructures using acousto-optic-modulated-stroboscopic-interferometry

✍ Scribed by Murali Manohar Pai; Gino Rinaldi; Muthukumaran Packirisamy; Narayanswamy Sivakumar

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 834 KB
• Volume: 42
• Category: Article
• ISSN: 0263-2241
• DOI: 10.1016/j.measurement.2008.07.004