States of hydrogen in crystalline silicon

✍ Scribed by M. Stutzmann; W. Beyer; L. Tapfer; C.P. Herrero

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 306 KB
• Volume: 170
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(91)90130-7

✦ Synopsis

Thc thermal transformation ol deuterium it] p-type crvslallinc silicon is sludicd wilt] a '~aricty ol experimental techniques. It is found lhal D-atolns initially mippcd at acceptor sites can hc transferred b~ low temperature annealing to a different state lcnlati~,c]\ ascribed to intcrstilia[ l). molecules, l)itfusion ol I) out of tt3c passixalcd sample only, occurs al temperatures significantly higher lhan this transformation temperature. This fact allows us to producc Si samplcs x,,ith cxtrelllelv high deuterium concentrations (several at<~ ) by a suitable passi\ation annealing >,Cqtlcncc. \Vilh increasing D concentration, a number of characleristic Si D dcfccl complexes have been observed by vibralional sp¢ctroscop).