𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Stabilization of Structure–Impurity and Electrophysical Parameters in the Si/SiO2 System

✍ Scribed by N. Ya. Zaitsev; G. Ya. Krasnikov; I. V. Matyushkin


Book ID
111567428
Publisher
Springer
Year
2000
Tongue
English
Weight
41 KB
Volume
29
Category
Article
ISSN
1063-7397

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


The peculiarities of Si/SiO2 interfaces
✍ T. Kryshtab; G. Gómez Gasga; N. Korsunska; M. Baran; S. Kirillova; L. Khomenkova 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 281 KB

Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp