𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Stability of thin platinum films implemented in high-temperature microdevices

✍ Scribed by R.M. Tiggelaar; R.G.P. Sanders; A.W. Groenland; J.G.E. Gardeniers

Book ID
104092615
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
635 KB
Volume
152
Category
Article
ISSN
0924-4247

No coin nor oath required. For personal study only.

✦ Synopsis

In this paper we report on structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400-950 β€’ C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffraction, electrical measurements, and optical microscope images of film sintering after annealing at high temperature. A method to obtain highly adhesive, patterned Pt films without adhesion layer is presented, which films show the highest reliability, in terms of structural integrity and electrical properties. Therefore this is the best option for implementation in high-temperature microdevices like microreactors and gas sensors operating at temperatures above 750 β€’ C.

πŸ“œ SIMILAR VOLUMES

Iridium oxide thin-film stability in hig
Iridium oxide thin-film stability in high-temperature corrosive solutions
✍ Kenneth Kreider πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 396 KB

The stability of sputtered iridium oxide films is investigated after exposure to pH 4, 7, and 10 solutions at 200Β°C (IS bar) and 245 "C (40 bar). These reactively sputtered films are being considered as pH-sensing electrodes in high-temperature high-pressure saline solutions such as those found unde

Thin-film platinum resistance thermomete
Thin-film platinum resistance thermometer for use at low temperatures and in high magnetic fields
✍ T. Haruyama; R. Yoshizaki πŸ“‚ Article πŸ“… 1986 πŸ› Elsevier Science 🌐 English βš– 240 KB

A thin-film platinum resistance thermometer (SDT101A, Tame Electric Work Company, Japan), which is available commercially, has useful characteristics for thermometry in the range of 20 to 300 K and in high magnetic fields up to 5 T. The Z function-table of this platinum resistance thermometer (PRT)

Stability in a high humidity environment
Stability in a high humidity environment of TCO thin films deposited at low temperatures
✍ Minami, Tadatsugu ;Kuboi, Takeshi ;Miyata, Toshihiro ;Ohtani, Yuusuke πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 163 KB

## Abstract The stability of transparent conducting Al‐ and Ga‐doped ZnO (AZO and GZO) thin films in a high humidity environment has been investigated for the purpose of finding substitutes for the indium‐tin‐oxide (ITO) thin films used in transparent electrode applications. It was found that the r