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Stability of the structure of dielectric films on silicon

✍ Scribed by L.N. Aleksandrov; F.L. Edelman

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 378 KB
Volume: 66
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(80)90074-7

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