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Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

✍ Scribed by Pan, Feixia; Kubby, Joel; Peeters, Eric; Tran, Alex T; Mukherjee, Subrata


Book ID
120919411
Publisher
Institute of Physics
Year
1998
Tongue
English
Weight
244 KB
Volume
8
Category
Article
ISSN
0960-1317

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