A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry

✍ Scribed by Pandey, Ashok Kumar; Pratap, Rudra

• Book ID: 120049448
• Publisher: Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 548 KB
• Volume: 18
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/18/10/105003