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Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator

✍ Scribed by Jue Chen; Hoheisel, D.; Rising, L.

Book ID: 114654652
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 441 KB
Volume: 47
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.2011.2147290

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