Growth and characterization of shape memory alloy thin films for Si microactuator technologies

✍ Scribed by N. Yaakoubi; C. Serre; S. Martínez; A. Pérez-Rodríguez; J. R. Morante; J. Esteve; J. Montserrat; E. Dufour-Gergam; J. P. Granchamp; A. Bosseboeuf; N. Frantz-Rodriguez

• Book ID: 110298914
• Publisher: Springer US
• Year: 2001
• Tongue: English
• Weight: 386 KB
• Volume: 12
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1011244327829