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Sputtered TiN thin films for improved corrosion resistance

✍ Scribed by P. Bhardwaj; O.J. Gregory; K. Bragga; M.H. Richman

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
562 KB
Volume
48-49
Category
Article
ISSN
0169-4332

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Ion beam coating techniques like ion implantation (II), ion beam mixing (IBM), and ion beam assisted deposition (IBAD) offer the possibility of protecting target windows against corrosion by very high quality thin layers of inert materials. 11: Ion implantation consisted of the preparation of thin