Thin layers for improving corrosion resistance of target windows

✍ Scribed by Peter Ballhause; Martin Barth; Wolfgang Enzinger; Gerhard K. Wolf; Birgitt C. Traving; Wolfgang Maier-Borst; Franz Oberdorfer

• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: French
• Weight: 65 KB
• Volume: 26
• Category: Article
• ISSN: 0022-2135
• DOI: 10.1002/jlcr.2580260180

✦ Synopsis

Ion beam coating techniques like ion implantation (II), ion beam mixing (IBM), and ion beam assisted deposition (IBAD) offer the possibility of protecting target windows against corrosion by very high quality thin layers of inert materials.

11: Ion implantation consisted of the preparation of thin surface layers by implanting ions with energies from 50 to 600 keV preferably into metallic substrates to form alloys.

IBM: Ion beam mixing was used for preparation of thin layers from materials which were previously coated galvanical-ly or by evaporation techniques. Deposits were interfacially mixed with the support material through bombardment with rare gas ions.

IBAD: Ion beam assisted deposition consisted of the deposition of a substrate vapor under simultaneous bombardment of the support preferably with a rare gas ion beam of 1-30 keV.