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Sputtered FeCoN soft magnetic thin films with high resistivity

✍ Scribed by Hai Jiang; Yingjian Chen; Guoda Lian


Book ID
114649710
Publisher
IEEE
Year
2003
Tongue
English
Weight
597 KB
Volume
39
Category
Article
ISSN
0018-9464

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## Abstract High‐frequency characteristics of a series of soft magnetic Fe–Co–B‐based thin films are investigated in the range of 0.5–5 GHz. It is found that in‐plane anisotropy can be caused by oblique incidence or applying an external field during deposition. The permeability and the resonance fr