Influence of the deposition conditions o
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M. Gadenne; P. Gadenne; M.T. Ramdou; J.P. Segaud; H. Lassri; R. Krishnan; C. Sel
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Article
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1993
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Elsevier Science
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English
⚖ 438 KB
We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an