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Sputtered FeHfO films with high electrical resistivity and good soft magnetic properties

✍ Scribed by Akihiro Makino; Yasuo Hayakawa


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
601 KB
Volume
181-182
Category
Article
ISSN
0921-5093

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Influence of the deposition conditions o
✍ M. Gadenne; P. Gadenne; M.T. Ramdou; J.P. Segaud; H. Lassri; R. Krishnan; C. Sel 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 438 KB

We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an