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Influence of Sputtering Gas Pressure on High-Frequency Soft Magnetic Properties of FeCoN Thin Film

✍ Scribed by Feng Xu; Zhiqin Liao; Qijun Huang; Chong Kim Ong; Shandong Li


Book ID
114654736
Publisher
IEEE
Year
2011
Tongue
English
Weight
383 KB
Volume
47
Category
Article
ISSN
0018-9464

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## Abstract High‐frequency characteristics of a series of soft magnetic Fe–Co–B‐based thin films are investigated in the range of 0.5–5 GHz. It is found that in‐plane anisotropy can be caused by oblique incidence or applying an external field during deposition. The permeability and the resonance fr