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Sputter depth profiling of thin films with LEIS and LENRS

✍ Scribed by S.G. Puranik; B.V. King


Book ID
107925596
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
401 KB
Volume
28
Category
Article
ISSN
0169-4332

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Improved depth resolution in Auger depth
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## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved