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Significance of sample rotation in auger electronspectroscopy sputter depth profiling of thin films

✍ Scribed by A. Zalar


Book ID
114085802
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
658 KB
Volume
193-194
Category
Article
ISSN
0040-6090

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Improved depth resolution in Auger depth
✍ W. Pamler; E. Wildenauer; A. Mitwalsky πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 662 KB

## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved