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Sputter deposition of compositional gradient magnetostrictive FeCo based thin films

✍ Scribed by M.D. Cooke; M.R.J. Gibbs; R.F. Pettifer

Book ID
114224917
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
112 KB
Volume
237
Category
Article
ISSN
0304-8853

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LiFePO 4 thin films have been sputtered from a pure LiFePO 4 target onto Ag/SS, Ag/Si 3 N 4 /Si and Si 3 N 4 /Si substrates. All of the deposited films were annealed at 973 K for 1 hr in H 2 /Ar (5 %) atmosphere. Substrate induced microstructural and crystallographic evolutions have been observed by