Thin films of carbon mixed LiFePO 4 were prepared by ionized magnetron sputter deposition (IMSD) and post anneal. The IMSD technique uses a built-in radio frequency coil to generate an inductively coupled plasma (ICP) confined close to the substrate. Therefore, the films were deposited under concurr
Electrochemical performance of magnetron sputter deposited LiFePO4-Ag composite thin film cathodes
โ Scribed by K.-F. Chiu; C.-L. Chen
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 892 KB
- Volume
- 205
- Category
- Article
- ISSN
- 0257-8972
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โฆ Synopsis
LiFePO 4 thin films have been sputtered from a pure LiFePO 4 target onto Ag/SS, Ag/Si 3 N 4 /Si and Si 3 N 4 /Si substrates. All of the deposited films were annealed at 973 K for 1 hr in H 2 /Ar (5 %) atmosphere. Substrate induced microstructural and crystallographic evolutions have been observed by a scanning electron microscope and X-ray diffraction. Energy dispersion spectra and X-ray photoelectron spectra revealed that Ag was mixed in the LiFePO 4 films deposited on Ag under layers. Ceramic metal composite thin films were obtained. The film conductivity (1 ร 10 -3 Scm -1 ) is therefore elevated by an order of six, compared with pure LiFePO 4 (10 -9 Scm -1 ). The electrochemical measurements of the LiFePO 4 -Ag films showed a flat plateau at 3.4 V (v.s. Li/Li + ) and a reversible capacity of 80 mAh/g. Optimization of Ag contents may further improve the discharge capacity.
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