✦ LIBER ✦

Spring-loaded DC-contact RF MEMS switches

✍ Scribed by Dimitrios Peroulis; Linda P. B. Katehi

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 533 KB
Volume: 14
Category: Article
ISSN: 1096-4290
DOI: 10.1002/mmce.20016

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✦ Synopsis

This paper reports on the design, fabrication, and testing of a novel springloaded DC-contact RF MEMS switch. Although the switch is electrostatically actuated, the on-state metal-to-metal contact is achieved through a stress-induced force. Detailed theoretical and experimental data for estimating the contact force are presented. The measured switches demonstrate an average on-state RF contact resistance of 0.5⍀ and an off-state capacitance of 10 fF with an average actuation voltage of 55 V. These results demonstrate the potential of stress-originated forces for developing low-power DC-contact RF MEMS switches.

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