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Comparison of AuNi5 films deposited by laser ablation and sputtering for RF MEMS switch contacts

✍ Scribed by Noha Sameh Farghal; Amr Shaarawi; Philippe Soussan

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 1013 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.11.007

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