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Spiral inductors on silicon—status and trends (invited article)

✍ Scribed by Joachim N. Burghartz

Book ID
101272015
Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
319 KB
Volume
8
Category
Article
ISSN
1096-4290

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✦ Synopsis

The status of the integration, the modeling, and the layout of spiral inductors on silicon substrates for rf circuits are reviewed. A summary of the current research activity in this field is presented. The possible inductor implementations are categorized either as conservative, following the silicon main stream, or as innovative approaches. It is concluded that the spiral inductor on silicon is a feasible device and finds extensive use in the design of future silicon-based rf circuits.

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