Spinodal decomposition and coarsening of stressed thin films on compliant substrates
β Scribed by P.H Leo; W.C Johnson
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 309 KB
- Volume
- 49
- Category
- Article
- ISSN
- 1359-6454
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Based on the von KΓ‘rmΓ‘n plate theory, the mechanics of a shaft-loaded blister test for thin film/substrate systems is studied by considering elastic substrate deformations and residual stresses in these films. In testing, films are attached to a substrate provided with a circular hole, through which
Si 1Γx Ge x thin films on the Ar + ion-implanted Si substrates with different implantation energy (30 keV, 40 keV and 60 keV) at the same implantation fluence (3 β’ 10 15 cm Γ2 ) were grown by ultra high vacuum chemical vapor deposition (UHVCVD). Various characterization technologies were used to cha