Spin coating process of sol-gel silicate films deposition: Effect of spin speed and processing temperature
β Scribed by Konstantin Vorotilov; Vladimir Petrovsky; Vladimir Vasiljev
- Publisher
- Springer
- Year
- 1995
- Tongue
- English
- Weight
- 1004 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0928-0707
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β¦ Synopsis
The effect of two factors having the most important influence on spin coating process of sol-gel films: the spin speed and the temperature (of the substrate and the applied solution) during film deposition is discussed. It is shown, that film thickness and thickness uniformity are determined by centrifugal driving force dynamics, viscous polymer rheology, solvent evaporation dynamics, and film porous microstructure.
π SIMILAR VOLUMES
Ultraviolet absorbing CeO 2 -TiO 2 coatings were prepared by the sol-gel spin-coating process heat treated at 500 8C. The films obtained were brilliant yellow, adherent and had some pattern on the soda-lime glass substrate. The optical transmittance, thickness and hardness of the films as a function