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Coating uniformity and device applicability of spin coated sol-gel PZT films

✍ Scribed by D.P. Birnie III; R.N. Vogt; M.N. Orr; J.R. Schifko

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 293 KB
Volume: 29
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00142-5

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