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Characterization of spin-coated silicate and phosphosilicate thin films prepared by the sol-gel method

✍ Scribed by Chul Woo Nam; Seong Ihl Woo

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 508 KB
Volume: 237
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90278-x

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