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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - Accuracy of ellipsometric measurements of Si-SiO2 structures

✍ Scribed by Gavrilenko, V. P.; Novikov, Yu. A.; Rakov, A. V.; Todua, P. A.; Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang

Book ID: 121077809
Publisher: SPIE
Year: 2010
Weight: 266 KB
Volume: 7718
Category: Article
DOI: 10.1117/12.853898

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