SPIE Proceedings [SPIE Optics East 2005 - Boston, MA (Sunday 23 October 2005)] Two- and Three-Dimensional Methods for Inspection and Metrology III - A fast three-step phase-shifting algorithm

✍ Scribed by Huang, Peisen S.; Zhang, Song; Harding, Kevin G.

• Book ID: 120809459
• Publisher: SPIE
• Year: 2005
• Weight: 460 KB
• Volume: 6000
• Category: Article
• DOI: 10.1117/12.631259