SPIE Proceedings [SPIE Optics East 2005 - Boston, MA (Sunday 23 October 2005)] Two- and Three-Dimensional Methods for Inspection and Metrology III - Phase error compensation for a 3-D shape measurement system based on the phase-shifting method

✍ Scribed by Zhang, Song; Huang, Peisen S.; Harding, Kevin G.

• Book ID: 120317174
• Publisher: SPIE
• Year: 2005
• Weight: 479 KB
• Volume: 6000
• Category: Article
• DOI: 10.1117/12.631256