SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Microfluidics and BioMEMS - Design and simulation of a vacuum micropump

✍ Scribed by Cui, Zhenjiang; Takoudis, Christos G.; Mastrangelo, Carlos H.; Becker, Holger

• Book ID: 120507244
• Publisher: SPIE
• Year: 2001
• Weight: 96 KB
• Volume: 4560
• Category: Article
• DOI: 10.1117/12.443067