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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Micromachined silicon slits for beam diagnostics in particle accelerators

✍ Scribed by Cianci, Elena; Notargiacomo, Andrea; Cianchi, Alessandro; Foglietti, Vittorio; Karam, Jean Michel; Yasaitis, John A.

Book ID: 120401405
Publisher: SPIE
Year: 2001
Weight: 292 KB
Volume: 4557
Category: Article
DOI: 10.1117/12.442951

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