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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - Integrated thermal sensor using optical channel waveguide

โœ Scribed by Ganguly, Amar K.; Chau, Kevin H.; French, Patrick J.


Book ID
120970061
Publisher
SPIE
Year
1997
Weight
663 KB
Volume
3224
Category
Article

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