✦ LIBER ✦

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - CaF2 for DUV lens fabrication: basic material properties and dynamic light-matter interaction

✍ Scribed by Letz, Martin; Engel, Axel; Mannstadt, Wolfgang; Parthier, Lutz; Natura, Ute; Knapp, Konrad; Smith, Bruce W.

No coin nor oath required. For personal study only.

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