SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Direct creation of microstuctures in fluorine-containing polymers

✍ Scribed by Nazmov, Vladimir; Pindyurin, Valery F.; Mezentseva, Lubov A.; Mchedlishvili, B. V.; Vilensky, Alexander I.; Shirkova, V. V.; Istomin, V. E.; Dobisz, Elizabeth A.

• Book ID: 121493294
• Publisher: SPIE
• Year: 2000
• Weight: 621 KB
• Volume: 3997
• Category: Article
• DOI: 10.1117/12.390037