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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Novel fabrication process for 3D meander-shaped microcoils in SU-8 dielectric and their application to linear micromotors

✍ Scribed by Seidemann, Volker; Buettgenbach, Stephanus; Behringer, Uwe F. W.; Uttamchandani, Deepak G.

No coin nor oath required. For personal study only.

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