SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses

✍ Scribed by Vollmann, Jacqueline; Profunser, Dieter M.; Dual, Jurg; Gorecki, Christophe; Jueptner, Werner P. O.; Kujawinska, Malgorzata

• Book ID: 120540086
• Publisher: SPIE
• Year: 2001
• Weight: 249 KB
• Volume: 4400
• Category: Article
• DOI: 10.1117/12.445590