SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Recent Developments in Traceable Dimensional Measurements - Precise interferometric measurements at single-crystal silicon yielding thermal expansion coefficients from 12° to 28°C and compressibility

✍ Scribed by Schoedel, Rene; Boensch, Gerhard; Decker, Jennifer E.; Brown, Nicholas

• Book ID: 121237834
• Publisher: SPIE
• Year: 2001
• Weight: 271 KB
• Volume: 4401
• Category: Article
• DOI: 10.1117/12.445624