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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation 2012 - Chengdu, China (Wednesday 8 August 2012)] Eighth International Symposium on Precision Engineering Measurement and Instrumentation - Capacitive micromachined ultrasonic resonator for ultra sensitive trace gas detection

โœ Scribed by Ge, Li-Feng; Lin, Jie

Book ID
121086266
Publisher
SPIE
Year
2013
Weight
234 KB
Volume
8759
Category
Article

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