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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation 2012 - Chengdu, China (Wednesday 8 August 2012)] Eighth International Symposium on Precision Engineering Measurement and Instrumentation - Error analysis and correction of grating interference displacement measurement system

✍ Scribed by Jiang, Minlan; Lu, Xinchao; Wang, Xiaodong; Xu, Xiuling; Lin, Jie

Book ID: 121327881
Publisher: SPIE
Year: 2013
Weight: 198 KB
Volume: 8759
Category: Article
DOI: 10.1117/12.2014881

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