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SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Advanced Microelectronic Processing Techniques - Influence of high-substrate-bias voltage on the characteristics of DLC coatings

✍ Scribed by Divakaran, Sheeja; Tay, Beng K.; Lau, Shu Ping; Harrison, H. Barry; Wee, Andrew T. S.; Gupta, Subhash

No coin nor oath required. For personal study only.

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