SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Microlithographic Techniques in Integrated Circuit Fabrication II - Simulation of resolution enhancement in contact lithography by off-axis illumination

✍ Scribed by Zhao, Yongkai; Huang, Huijie; Lu, Dunwu; Du, Longlong; Yuan, Cailai; Jiang, Baocai; Wang, Runwen; Mack, Chris A.; Yuan, XiaoCong

• Book ID: 121492586
• Publisher: SPIE
• Year: 2000
• Weight: 194 KB
• Volume: 4226
• Category: Article
• DOI: 10.1117/12.404850