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SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Microlithographic Techniques in Integrated Circuit Fabrication II - Simulation of resolution enhancement in contact lithography by off-axis illumination

โœ Scribed by Zhao, Yongkai; Huang, Huijie; Lu, Dunwu; Du, Longlong; Yuan, Cailai; Jiang, Baocai; Wang, Runwen; Mack, Chris A.; Yuan, XiaoCong


Book ID
121492586
Publisher
SPIE
Year
2000
Weight
194 KB
Volume
4226
Category
Article

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