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SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Optomechanical Engineering 2000 - Optomechanical modeling for fabrication of MEMS micromirrors

✍ Scribed by Odhner, Jeff; Keating, Daniel J.; Finch, Nora; Kahan, Mark A.

Book ID: 121299017
Publisher: SPIE
Year: 2001
Weight: 888 KB
Volume: 4198
Category: Article
DOI: 10.1117/12.417339

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