SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Materials, Structures, and Integrated Systems - DC magnetron-sputtered molybdenum thin films for micromechanical structures

✍ Scribed by Kwok, Chee Y.; Puzzer, Tom; Lin, Kwang M.; Haji-Babaei, Jafar; Hariz, Alex; Varadan, Vijay K.; Reinhold, Olaf

• Book ID: 121445431
• Publisher: SPIE
• Year: 1997
• Weight: 805 KB
• Volume: 3241
• Category: Article
• DOI: 10.1117/12.293487